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Conference paper

Thermal Microactuator Characterisation

In Proceedings of Design, Test and Microfabrication of Mems and Moems — 1999, pp. 1046-1055
From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Language: English
Publisher: SPIE
Year: 1999
Pages: 1046-1055
Proceedings: Design, test and microfabrication of MEMS and MOEMS
ISBN: 0819431540 and 9780819431547
Types: Conference paper

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Analysis