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Book chapter

"Protection of H-Passivated Silicon Surfaces by Room Temperature Direct Bonding"

In Proceedings of the Electrochemical Society Pv 97-36 — 1997, pp. 445-452

By Ljungberg, Karin1; Grey, Francois1

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Language: English
Publisher: The Electrochemical Society
Year: 1997
Pages: 445-452
Types: Book chapter

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Analysis