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Conference paper

Tyndfilmprocesser med RF-sputtering

In Metallurgiske Processer I Dansk Industri — 1987, pp. 1-22

By Andersen, N.H.1

Edited by Skjelsager, G.; Lilholt, H.; Gundel, P.H.

From

Risø National Laboratory for Sustainable Energy, Technical University of Denmark1

Language: Danish
Publisher: Dansk Metallurgisk Selskab
Year: 1987
Pages: 1-22
Proceedings: Dansk Metallurgisk Selskabs Vintermøde 1987
ISBN: 8787535149 and 9788787535144
Types: Conference paper

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