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10 items by relevance
1 Book chapter

Development of a modal analysis accelerometer based on a tunneling displacement transducer

Scheeper, Patrick; Reynolds, J. K.; Kenny, T.

Transducers 97 — 1997, pp. 867-870

Year: 1997

Language: English

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b mcalhngij o kdfep
2 Conference paper

Development of a modal analysis accelerometer based on a tunneling displacement transducer

Scheeper, P.R.; Reynolds, J.K.; Kenny, T.W.

Proceedings of International Solid State Sensors and Actuators Conference (transducers '97) — 1997, Volume 2, pp. 867,868,869,870

An accelerometer based on a tunneling displacement transducer is presented. The sensor is fabricated using silicon micromachining techniques for fabrication of the seismic mass, the suspension beams and the tunneling tip and electrodes. The demonstrated accelerometer shows linear response from 0.2

Year: 1997

Language: English

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o h gckmefipnjbadl

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