High efficiency metal marking with CO2 laser and glass marking with excimer laser

Today, mask based laser materials processing and especially marking is widely used. However, the energy efficiency in such processes is very low [1].This paper gives a review of the results, that may be obtained using the energy enhancing technique [1]. Results of simulations performed with a thoroughly tested ray-tracing model is presented and compared with experimental results.

Special emphasis is put on two different applications namely marking in metal with TEA-CO2 laser and marking in glass with excimer laser. The results are evaluated on the basis of the achievable energy enhancement and the uniformity of the mask illumination. The prospects of developing a commercial product is discussed.