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Report

Confocal scanning microscopy

From

Department of Management Engineering, Technical University of Denmark1

This report is based on a metrological investigation on confocal microscopy technique carried out by Uffe Rolf Arlø Theilade and Paolo Bariani. The purpose of the experimental activity was twofold a metrological instrument characterization and application to assessment of rough PP injection moulded replicated topography.

Confocal microscopy is seen to be a promising technique in metrology of microstructures. Some limitations with respect to surface metrology were found during the experiments. The experiments were carried out using a Zeiss LSM 5 Pascal microscope owned by the Danish Polymer Centre and located at Risø.

Niels Bent Larsen instructed the authors and He is acknowledged for the valuable contribution given.

Language: English
Publisher: Institut for Produktion og Ledelse, DTU
Year: 2003
Types: Report
Keywords

MM03.29

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