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10 items by relevance
1 Journal article

PMMA to SU-8 bonding for polymer based lab-on-a-chip systems with integrated optics

Olsen, Brian Bilenberg; Nielsen, Theodor; Clausen, Bjarne Hans; Kristensen, Anders

Journal of Micromechanics and Microengineering — 2004, Volume 14, Issue 6, pp. 814-818

We present an adhesive bonding technique developed for SU-8 based "lab-on-a-chip"- systems with integrated optical components. Microfluidic channels and optical components (e.g. wave-guides) are defined in SU-8 photoresist on a Pyrex glass substrate. The microfluidic channels are sealed by a second

Year: 2004

Language: English

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2 Conference paper

PMMA to SU-8 Bonding for Polymer Based Lab-on-a-chip Systems with Integrated Optics

Olsen, Brian Bilenberg; Nielsen, Theodor; Nilsson, Daniel

Proceedings of the 17th European Conference on Solid-state Tranducers, Eurosensors 2003 — 2003, pp. 486-489

Year: 2003

Language: English

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3 Conference paper

PMMA to SU-8 Bonding for Polymer Based Lab-on -a-chip Systems with Integrated Optics

Clausen, Bjarne

2003 Proceedings of the 17th European Conf. on Solid-state Transducers — 2003

An adhesive bonding technique for wafer-level sealing of SU-8 based lab-on-a-chip microsystems with integrated optical components is presented. Microfluidic channels and optical components, e.g. waveguides, are fabricated in cross-linked SU-8 and sealed with a Pyrex glass substrate by means

Year: 2003

Language: English

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