Conference paper
Plasma polymerization by Softplasma
Risø National Laboratory for Sustainable Energy, Technical University of Denmark1
The Danish Polymer Centre, Department of Chemical and Biochemical Engineering, Technical University of Denmark2
Department of Chemical and Biochemical Engineering, Technical University of Denmark3
Technical University of Denmark4
In the late 19th century, the first depositions - known today as plasma polymers, were reported. In the last century, more and more research has been put into plasma polymers. Many different deposition systems have been developed. [1, 2] Shi F. F. broadly classified them into internal electrode, external electrode, and electrodeless microwave or high frequency reactors. [3] Softplasma™ is an internal electrode plasma setup powered by low frequenc~ gower supply.
It was developed in late 90s for surface treatment of silicone rubber. [ ]- 5] It is a low pressure, low electron density, 3D homogenous plasma. In this study, we are presenting the surface modification"pf polymers by plasma polymerization using Softplasma™. Softplasma™ can be used for two major types of polymerization: polymerization of vinyl monomers, where plasma acts as initiator; chemical vapour deposition, where plasma acts as reactive splvent (as shown in Figure 1). 1] H.
Biederman, in Plasma Polymer Films. (ed.) H. Biederman. Imperial College Press, Singapore, 13-24 ~OO~· '. , [2] R. d'Agostino et.a!. in Plasma Depd~itiqn, 'Treatment, and Etching ofPolymers. (ed.) R. d'Agostino, Academic Press, U.S. (1990). [3] F. F. Shi. Recent advances in polymer thin films prepared by plasma polymerization synthesis, structural characterization, properties and applications.
Surface and Coating Technology 82, 1 (1996). [4] B. Winther-Jensen. WOO0235895A2. A method and apparatus for excitation of a plasma, (2002). [5]. K. Glejbol. EP00741408Bl. NKT Research Center AS. A method and an electrode system for excitation of a plasma (1996).
Language: | English |
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Year: | 2008 |
Proceedings: | Nordic Polymer Days 2008 |
Types: | Conference paper |
ORCIDs: | Jankova Atanasova, Katja |