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10 items by relevance
1 Journal article

Use of wafer maps in integrated circuit manufacturing

Hansen, C.K.; Thyregod, P.

Microelectronics Reliability — 1998, Volume 38, Issue 6-8, pp. 1155-1164

A wafer map identifies the locations of defective integrated circuits (chips) on a silicon wafer and provides important spatial information. The wafer yield is a useful measure of the process quality, but other features are necessary to account for. Careful statistical analysis addressing

Year: 1998

Language: English

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gcljoa mk hindef pb
2 Conference paper

Use of Wafer Maps in Integrated Circuit Manufacturing

Hansen, C.K.; Thyregod, Poul

9th European Symposium on Reliability of Electron Devices Failure Physics and Analysis — 1998

Year: 1998

Language: English

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