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title:(Focused AND Ion AND Beam AND \\(FIB\\) AND Modification AND of AND Topology AND Optimized AND Polysilicon AND Microgrippers)

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1 Conference paper

Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

Year: 2008

Language: English

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2 Conference paper

Focused Ion Beam (FIB) Modification of Topology Optimized Polysilicon Microgrippers

Sardan, Özlem; Nordström Andersen, Karin; MacDonald, A. Nicole; Bøggild, Peter; Sigmund, Ole; Horsewell, Andy

Proceedings of the Asme 2008 International Design Engineering Technical Conferences & Computers and Information in Engineering Conference — 2008, pp. 629-631

Year: 2008

Language: English

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