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title:(Optical AND loss AND analysis AND of AND silicon AND rich AND nitride AND waveguides)

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1 Conference paper

Optical loss analysis of silicon rich nitride waveguides

An analysis of the propagation loss in high-index LPCVD-grown silicon rich nitride (SRN) slab waveguides and channel waveguides is presented. A propagation loss as low as 0.6 dB/cm has been achieved.

Year: 2002

Language: English

leo pabch ndim fjgk
2 Conference paper

Optical loss analysis of silicon rich nitride waveguides and their applications

Year: 2002

Language: English

pilgedcm nbokja hf

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