Reference micro-objects and procedures to establish traceability in micro metrology: Final. COTECH EU FP7 Integrated Project (Grant Agreement no.: CP-IP 214491-2)

The report presents methods and procedure to establish the traceability of measurements at both micro and sub-micro dimensional scales. Reference artefacts and new methodologies to ensure traceability of dimensional and geometrical 3D measurements (absolute dimensions below 3 mm, micro features with critical dimensions below 100 μm, roughness lower than 100 nm) have been developed to allow validation and verification of product and process tolerances as developed within the COTECH project.