Conference paper
Sub-µm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications
Language: | English |
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Publisher: | Copy & Druck |
Year: | 2008 |
Pages: | 226-230 |
Proceedings: | 10th International Conference of the European Society for Precision Engineering and Nanotechnology |
ISBN: | 0955308259 and 9780955308253 |
Types: | Conference paper |
ORCIDs: | Tosello, Guido and Hansen, Hans Nørgaard |