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Conference paper

Sub-µm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications

In International Conference of the European Society for Precision Engineering and Nanotechnology — 2008, pp. 226-230
From

Forschungs Zentrum Karlsruhe GmbH1

Manufacturing Engineering, Department of Mechanical Engineering, Technical University of Denmark2

Department of Mechanical Engineering, Technical University of Denmark3

University of Freiburg4

French Alternative Energies and Atomic Energy Commission5

Language: English
Publisher: Copy & Druck
Year: 2008
Pages: 226-230
Proceedings: 10th International Conference of the European Society for Precision Engineering and Nanotechnology
ISBN: 0955308259 and 9780955308253
Types: Conference paper
ORCIDs: Tosello, Guido and Hansen, Hans Nørgaard

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