Query: title:(A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions), Author: Petersen

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title:(A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions) Author: Petersen

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title:(A AND comparative AND study AND of AND size AND dependent AND four-point AND probe AND sheet AND resistance AND measurement AND on AND laser AND annealed AND ultra AND shallow AND junctions)

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1 Journal article

Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions 10.1116/1.2794743

Petersen, Dirch Hjorth; Lin, Rong; Hansen, Torben Mikael; Rosseel, E.; Vandervorst, W.; Markvardsen, C.; et al. (2 more)

Journal of Vacuum Science and Technology B — 2008, Volume 26, Issue 1, pp. 362-367

In this comparative study, the authors demonstrate the relationship/correlation between macroscopic and microscopic four-point sheet resistance measurements on laser annealed ultra-shallow junctions (USJs). Microfabricated cantilever four-point probes with probe pitch ranging from 1.5 to 500 mu m

Year: 2008

Language: English

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2 Conference paper

A comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra shallow junctions