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Conference paper

Organic ice resists: effect of electron beam irradiation on frozen hydrocarbons

From

DTU Danchip, Technical University of Denmark1

Center for Electron Nanoscopy, Technical University of Denmark2

Language: English
Year: 2018
Proceedings: The 13th meeting of the “Ionizing Radiation and Polymers” symposium
Types: Conference paper
ORCIDs: Han, Anpan and Beleggia, Marco

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Analysis