Conference paper · Journal article
Plasma parameters in the vicinity of the quartz window of a low pressure surface wave discharge produced in O2
Risø National Laboratory for Sustainable Energy, Technical University of Denmark1
Optics and Plasma Research Department, Risø National Laboratory for Sustainable Energy, Technical University of Denmark2
Plasma Physics and Technology, Optics and Plasma Research Department, Risø National Laboratory for Sustainable Energy, Technical University of Denmark3
Plasma parameters in the vicinity of the dielectric window of a low density, microwave discharge produced in 0, at 915 N/FHz are investigated by a spherical probe and optical emission spectroscopy while the microwave field distribution is measured by a spectrum analyzer. The electron energy distribution function is found to be strongly dependent on the position with respect to the slot antenna, exhibiting a group of energetic electrons at locations where the electric field and the optical intensity exhibit maximum values.
The density of energetic electrons decreases sharply just a few cm away from the dielectric. (c) 2006 Elsevier B.V. All rights reserved.
| Language: | English |
|---|---|
| Year: | 2007 |
| Pages: | 4869-4873 |
| Proceedings: | 3rd International Symposium on Dry Process - DPS 2005 |
| ISSN: | 18792731 and 00406090 |
| Types: | Conference paper and Journal article |
| DOI: | 10.1016/j.tsf.2006.10.050 |
| ORCIDs: | Stamate, Eugen |
Heating mechanism Langmuir probe Surface wave plasma Thermal probe
