Conference paper · Journal article
Controlling the ion flux on substrates of different geometry by sheath-lens focusing effect
Risø National Laboratory for Sustainable Energy, Technical University of Denmark1
Optics and Plasma Research Department, Risø National Laboratory for Sustainable Energy, Technical University of Denmark2
Plasma Physics and Technology, Optics and Plasma Research Department, Risø National Laboratory for Sustainable Energy, Technical University of Denmark3
It is shown that a three-dimensional plasma sheath lens that forms on biased electrodes interfacing insulators exhibits novel characteristics such as ion focusing on desired locations, controllability of ion flux uniformity, formation of passive surfaces and applicability to plasma diagnostics. The ion flux profile on substrates of different geometry is obtained by three dimensional simulations of potential distribution and ion trajectory, while experiments are realized in electropositive and electronegative DC and ICP discharges.
| Language: | English |
|---|---|
| Year: | 2007 |
| Pages: | 4853-4859 |
| Proceedings: | 3rd International Symposium on Dry Process - DPS 2005 |
| ISSN: | 18792731 and 00406090 |
| Types: | Conference paper and Journal article |
| DOI: | 10.1016/j.tsf.2006.10.071 |
| ORCIDs: | Stamate, Eugen |
