Journal article
Principle and application of a thermal probe to reactive plasmas
A thermal probe for plasma diagnostics is introduced. The method is based upon measuring the equilibrium temperature of a conducting sphere as a function of its applied bias. The resulting temperature–voltage characteristic is processed using a theoretical model that accounts for charge and thermodynamic balance.
The thermal probe is capable of detecting negative ions and shows sensitivity to certain chemical reactions. Measurements performed in Ar, Ar/SF6, and O2 show good agreement among the plasma parameters using thermal and Langmuir probes.
Language: | Undetermined |
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Publisher: | American Institute of Physics |
Year: | 2002 |
Pages: | 3066-3068 |
ISSN: | 10773118 and 00036951 |
Types: | Journal article |
DOI: | 10.1063/1.1473688 |