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Conference paper

Depth-dependent composition of sputtered ZnO:Al

By Crovetto, Andrea1,2; Ottsen, Tobias3; Stamate, Eugen4,5; Kjær, Daniel1,2; Schou, Jørgen6,7; Hansen, Ole1,2,8

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark2

Technical University of Denmark3

Department of Energy Conversion and Storage, Technical University of Denmark4

Fundamental Electrochemistry, Department of Energy Conversion and Storage, Technical University of Denmark5

Department of Photonics Engineering, Technical University of Denmark6

Optical Microsensors and Micromaterials, Department of Photonics Engineering, Technical University of Denmark7

Surface Physics and Catalysis, Department of Physics, Technical University of Denmark8

Language: English
Year: 2016
Proceedings: 6<sup>th</sup> International Symposium on Transparent Conductive Materials
Types: Conference paper
ORCIDs: Crovetto, Andrea , Stamate, Eugen , Schou, Jørgen and Hansen, Ole

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