Journal article
Autonomous multi-sensor micro-system for measurement of ocean water salinity
Department of Micro- and Nanotechnology, Technical University of Denmark1
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
Center for Nanoteknologi, Centers, Technical University of Denmark4
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark5
This paper describes the design, fabrication and application of a micro-fabricated salinity sensor system. The theoretical electrochemical behaviour is described using electrical equivalent diagrams and simple scaling properties are investigated analytically and numerically using finite element method (FEM).
The chip design and fabrication is described and measurement results of two different electrode designs are presented. The 4 mm x 4 mm multi-sensor allows for salinity determination with an accuracy of +/- 0.5 psu through determination of the electrical conductivity, temperature and pressure with accuracies of +/- 0.6 mS, +/- 0.065 degrees C and +/- 0.05 bar, respectively.
| Language: | English |
|---|---|
| Year: | 2008 |
| Pages: | 474-484 |
| ISSN: | 18733069 and 09244247 |
| Types: | Journal article |
| DOI: | 10.1016/j.sna.2008.06.004 |
| ORCIDs: | Birkelund, Karen , Hansen, Ole and Thomsen, Erik Vilain |
Conductivity Depth Micro-system Multi-sensor Salinity Silicon Temperature
