Journal article
Experimental Validation of Topology Optimization for RF MEMS Capacitive Switch Design
In this paper, we present 30 distinct RF MEMS capacitive switch designs that are the product of topology optimizations that control key mechanical properties such as stiffness, response to intrinsic stress gradients, and temperature sensitivity. The designs were evaluated with high-accuracy simulations prior to micro-fabrication.
We built and tested more than 170 switches, including at least five per distinct design. Experimental results confirm that the finite element models are accurate and that the switches behave as intended by the different optimizations. Extensive testing results include actuation and release voltages as a function of temperature, switching times, capacitance ratios, fitted S-parameters, and profile measurements during actuation and over temperature. $\hfill{[2013\hbox{-}0203]}$
Language: | English |
---|---|
Publisher: | IEEE |
Year: | 2013 |
Pages: | 1296-1309 |
ISSN: | 19410158 and 10577157 |
Types: | Journal article |
DOI: | 10.1109/JMEMS.2013.2283241 |
ORCIDs: | Sigmund, Ole |
Capacitive switch Components, Circuits, Devices and Systems Engineered Materials, Dielectrics and Plasmas Mechanical design Optimization RF MEMS RF switch Stress stiffening Temperature sensitivity Topology optimization
RF MEMS capacitive switch design Radio frequency S-parameters Stress Switches Temperature measurement Topology Voltage measurement actuation capacitance ratios capacitive switch finite element analysis finite element models intrinsic stress gradients mechanical design microfabrication microswitches microwave switches network topology optimisation optimization profile measurements release voltages stiffness stress effects stress stiffening temperature sensitivity topology optimization