Journal article
Fully etched apodized grating coupler on the SOI platform with −058 dB coupling efficiency
Department of Photonics Engineering, Technical University of Denmark1
Nanophotonic Devices, Department of Photonics Engineering, Technical University of Denmark2
Ultra-fast Optical Communication, Department of Photonics Engineering, Technical University of Denmark3
Université de Rennes4
Diode Lasers and LED Systems, Department of Photonics Engineering, Technical University of Denmark5
We design and fabricate an ultrahigh coupling efficiency (CE) fully etched apodized grating coupler on the silicon- on-insulator (SOI) platform using subwavelength photonic crystals and bonded aluminum mirror. Fabrication error sensitivity andcoupling angle dependence are experimentally investigated.
A recordultrahighCE of − 0 . 58 dB with a 3 dB bandwidth of 71 nm and low back reflection are demonstrated.
Language: | English |
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Year: | 2014 |
Pages: | 5348-50 |
ISSN: | 15394794 and 01469592 |
Types: | Journal article |
DOI: | 10.1364/OL.39.005348 |
ORCIDs: | Ding, Yunhong , Ou, Haiyan and Yvind, Kresten |