Journal article
Collimated Magnetron Sputter Deposition for Mirror Coatings
In
X-ray Optics and Instrumentation
—
2008, Volume 2008, pp. 1-9
Abstract
At the Danish National Space Center (DNSC), a planar magnetron sputtering chamber has been established as a research and production coating facility for curved X-ray mirrors for hard X-ray optics for astronomical X-ray telescopes. In the following, we present experimental evidence that a collimation of the sputtered particles is an efficient way to suppress the interfacial roughness of the produced multilayer.
We present two different types of collimation optimized for the production of low roughness curved mirrors and flat mirrors, respectively.
| Language: | English |
|---|---|
| Publisher: | Hindawi Limited |
| Year: | 2008 |
| Pages: | 1-9 |
| ISSN: | 16877640 and 16877632 |
| Types: | Journal article |
| DOI: | 10.1155/2008/792540 |
| ORCIDs: | Christensen, Finn Erland and 0000-0002-4481-3615 |
