Polymer microvalve with pre-stressed membranes for tunable flow–pressure characteristics

A novel, inexpensive, polymer-based valve approach is presented that offers the combination of a check valve’s rectifying properties with the possibility to actively control the flow rate in the forward (open) direction. An elastic membrane with an incision is clamped between two rigid polymer plates and expands when pressure is applied in the forward direction allowing fluid to pass.

In the backward direction, expansion of the membrane is not possible and flow is prevented. Varying the clamping force influences the expansion capability of the membrane due to its elasticity and thus enables control of the flow rate.