Journal article
MEMS climate sensor for crops in greenhouses
Department of Micro- and Nanotechnology, Technical University of Denmark1
Optofluidics, Department of Micro- and Nanotechnology, Technical University of Denmark2
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
University of Copenhagen5
We have developed and fabricated a multi-sensor chip for greenhouse applications and demonstrated the functionality under controlled conditions. The sensor consists of a humidity sensor, temperature sensor and three photodiodes sensitive to blue, red and white light, respectively. The humidity sensor responds linearly with humidity with a full scale change of 5.6 pF.
The best performing design measures a relative change of 48%. The temperature sensor responds linearly with temperature with a temperature coefficient of resistance of 3.95 x 10(-3) K-1 and a sensitivity of 26.5 Omega degrees C-1. The three photodiodes have been characterized and show an almost ideal diode behavior with an ideality factor of 1.27 and a series resistance of 14.9 Omega.
The diodes are sensitive to blue, red and white light with the measured quantum efficiencies of 69%, 81% and 68%, respectively. The temperature and humidity sensors have further been tested on plants in a greenhouse, demonstrating that individual plant behavior can be monitored.
| Language: | English |
|---|---|
| Year: | 2010 |
| Pages: | 085021 (7pp) |
| ISSN: | 13616439 and 09601317 |
| Types: | Journal article |
| DOI: | 10.1088/0960-1317/20/8/085021 |
| ORCIDs: | Birkelund, Karen , Lei, Anders and Thomsen, Erik Vilain |
