Conference paper
Pulse mode actuation-readout system based on MEMS resonator for liquid sensing
A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme.
In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2014 |
| Pages: | 216-219 |
| Proceedings: | 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems |
| ISBN: | 1479947253 , 1479947261 , 9781479947256 and 9781479947263 |
| Types: | Conference paper |
| DOI: | 10.1109/NEMS.2014.6908794 |
Bioengineering Communication, Networking and Broadcast Technologies Components, Circuits, Devices and Systems Engineered Materials, Dielectrics and Plasmas Frequency measurement Humidity Humidity measurement Micromechanical devices Photonics and Electrooptics Robotics and Control Systems Sensors Vibrations humidity sensing mass sensing pulse mode resonant frequency
MEMS resonator Resonant frequency bulk disk resonator capacitive readout scheme chemical sensors dynamic mode feedback loop feedthrough compensation humidity sensing application humidity sensors liquid bio-chemical sensing environment microactuators microelectromechanical systems micromechanical resonators pulse mode actuation-readout system readout circuitry simple straightforward nonloop pulse mode actuation
