Replication fidelity assessment of polymer large area sub-μm structured surfaces using fast angular intensity distribution measurements

The present investigation addresses one of the key challenges in the product quality control of transparent polymer substrates, identified in the replication fidelity of sub-μm structures over large area. Additionally the work contributes to the development of new techniques focused on in-line characterization of large nanostructured surfaces.

In particular the aim of the present paper is to introduce initial development of a metrology approach to quantify the replication fidelity of produced 500 nm diameter semi-spheres via anodizing of aluminum (Al) and subsequent nickel electroforming to COC injection molded polymer parts. Calibrated AFM measurements were used to develop a model based on scalar diffraction theory able to calculate the expected nickel and COC substrates angular distribution of reflected and transmitted intensity respectively.