Conference paper
Applicability of Acoustic Emission monitoring to micro polishing
In
Proceedings of the 18th International Conference of the European Society for Precision Engineering and Nanotechnology
—
2018, pp. 385-386
Abstract
Application of process monitoring solutions to micro polishing is affected by the low intensity of the measured signals, which influences the capability to extract useful information. This work explores the applicability of acoustic emission monitoring for detection of process completion through End Point Detection (EPD) in micro polishing.
Several polishing tests have been conducted by gradually reducing the contact area and the acoustic emission signal generated by the process is acquired and analysed. The work shows that the monitoring solutions applied in conventional polishing can potentially be applied to the micro process.
| Language: | English |
|---|---|
| Publisher: | The European Society for Precision Engineering and Nanotechnology |
| Year: | 2018 |
| Pages: | 385-386 |
| Proceedings: | 18th International Conference of the european Society for Precision Engineering and Nanotechnology (euspen 18) |
| Types: | Conference paper |
| ORCIDs: | De Chiffre, L. |
