Conference paper
Tunable micro-fluidic multi-component micro-lens system with integrated actuator
A design approach and new manufacturing technique for a novel type of stacked fiuidic multi-chamber tunable lenses is presented. The hybrid design with a PDMS fluidic platform and highly accurate silicon inserts for lenses and stops offers flexibility and extensibility, leading to fully functional miniature tunable optical lens systems with the ability to control low-order aberrations.
The optical properties of this "micro-optical construction kit" are fully customizable by the arrangement and design of the inserts. The layout of the platform allows the combination of the fluidic lens system with a separately fabricated actuator module. With this, a focal length tuning range down to several millimeters can be achieved.
Language: | English |
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Publisher: | IEEE |
Year: | 2010 |
Pages: | 799-802 |
Proceedings: | 23rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2010) |
ISBN: | 1424457610 , 1424457637 , 1424457645 , 9781424457618 , 9781424457632 and 9781424457649 |
ISSN: | 10846999 |
Types: | Conference paper |
DOI: | 10.1109/MEMSYS.2010.5442285 |