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Conference paper

Characterization of large area nanostructured surfaces using AFM measurements

In Proceedings of the 12th Euspen International Conference — 2012
From

Department of Mechanical Engineering, Technical University of Denmark1

Manufacturing Engineering, Department of Mechanical Engineering, Technical University of Denmark2

DFM - Dansk Fundamental Metrologi A/S3

A surface characterisation study has been developed to validate an innovative tool making solution for nano patterning large areas via anodizing of aluminium (Al) and subsequent nickel electroforming. A surface topography characterization through atomic force microscopy (AFM) indicated a decreased magnitude of the 3D surface amplitude parameters chosen for the analysis, when increasing the Al purity from 99,5% to 99,999%.

AFM was then employed to evaluate the periodical arrangements of the nano structured cells. Image processing was used to estimate the average areas value, the height variation relative to an average plane and the coefficient of variation of the fitted features curvature radius.

Language: English
Publisher: The European Society for Precision Engineering and Nanotechnology
Year: 2012
Proceedings: 12th euspen International Conference
Types: Conference paper
ORCIDs: Calaon, Matteo , Hansen, Hans Nørgaard and Tosello, Guido

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