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Conference paper

Fast packaging of polymer cantilever chip by micromilling

From

Bioprobes, Department of Micro- and Nanotechnology, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

POEM, Department of Micro- and Nanotechnology, Technical University of Denmark3

Language: English
Year: 2005
Proceedings: 1st International Conference on Multi-Material Micro Manufacture (4M2005)
Types: Conference paper
ORCIDs: Boisen, Anja

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