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Conference paper

Comparison of several methods for chemical modification and micropatterning of the SU-8 photoresist

In Mne - 33rd International Conference on Micro and Nano Engineering — 2007, pp. 283-284
From

Bioprobes, Department of Micro- and Nanotechnology, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

Micro Array Technology, Department of Micro- and Nanotechnology, Technical University of Denmark3

Language: English
Year: 2007
Pages: 283-284
Proceedings: 33rd International Conference on Micro- and Nano-Engineering
Types: Conference paper
ORCIDs: Keller, Stephan Urs , Dufva, Hans Martin and Boisen, Anja

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