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Conference paper

Precision of Micro Hall Effect Measurements in Scribe Line Test Pads of B-doped SiGe

By Witthøft, Maria-Louise1; Østerberg, Frederik Westergaard1; Bogdanowicz, Janusz2; Schulze, Andreas2; Vandervorst, Wilfried2; Lin, Rong3; Hartmann Henrichsen, Henrik3; Nielsen, Peter F.3; Hansen, Ole1,4,5; Petersen, Dirch Hjorth1

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Interuniversitair Micro-Elektronica Centrum2

CAPRES A/S3

Surface Physics and Catalysis, Department of Physics, Technical University of Denmark4

Silicon Microtechnology, Department of Micro- and Nanotechnology, Technical University of Denmark5

Language: English
Year: 2017
Proceedings: International Conference on Frontiers of Characterization and Metrology for Nanoelectronics 2017
Types: Conference paper
ORCIDs: Witthøft, Maria-Louise , Hansen, Ole and Petersen, Dirch Hjorth

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