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Conference paper

Nickel silicide thermal stability: effects of oxygen anneal and silicon microstructure

In Proceedings of the 20th European Conference on Solid-state Transducers, Eurosensors Xx, Gothenburg, Sweden, September 17-20, 2006, Paper #w2c-p3 — 2006

By Thorsteinsson, Sune1,2; Jensen, Søren1,2; Quaade, Ulrich3; Larsen, A.N.; Hansen, J.L.; Hansen, Ole2,4

From

Microreactors, Department of Micro- and Nanotechnology, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

Department of Physics, Technical University of Denmark3

MicroNano Tribology and Modeling, Department of Micro- and Nanotechnology, Technical University of Denmark4

Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark5

Language: English
Year: 2006
Proceedings: 20th European Conference on Solid-State Transducers
Types: Conference paper
ORCIDs: Thorsteinsson, Sune and Hansen, Ole

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