Conference paper
Corrosion resistant capacitive pressure sensor
MEMS-AppliedSensors, Department of Micro- and Nanotechnology, Technical University of Denmark1
Department of Micro- and Nanotechnology, Technical University of Denmark2
Microreactors, Department of Micro- and Nanotechnology, Technical University of Denmark3
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark4
Language: | English |
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Year: | 2006 |
Pages: | 68-69 |
Proceedings: | 20th European Conference on Solid-State Transducers |
ISBN: | 9163192802 and 9789163192807 |
Types: | Conference paper |
ORCIDs: | Pedersen, Thomas , Hansen, Ole and Thomsen, Erik Vilain |