Journal article
Microfabricated photoplastic cantilever with integrated photoplastic/carbon based piezoresistive strain sensor
Nanointegration, Department of Micro- and Nanotechnology, Technical University of Denmark1
Department of Micro- and Nanotechnology, Technical University of Denmark2
Microreactors, Department of Micro- and Nanotechnology, Technical University of Denmark3
Technical University of Denmark4
Bioprobes, Department of Micro- and Nanotechnology, Technical University of Denmark5
We present an SU-8 micrometer sized cantilever strain sensor with an integrated piezoresistor made of a conductive composite of SU-8 polymer and carbon black particles. The composite has been developed using ultrasonic mixing. Cleanroom processing of the polymer composite has been investigated and it has been shown that it is possible to pattern the composite by standard UV photolithography.
The composite material has been integrated into an SU-8 microcantilever and the polymer composite has been demonstrated to be piezoresistive with gauge factors around 15-20. Since SU-8 is much softer than silicon and the gauge factor of the composite material is relatively high, this polymer based strain sensor is more sensitive than a similar silicon based cantilever sensor. (c) 2006 American Institute of Physics.
Language: | English |
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Publisher: | American Institute of Physics |
Year: | 2006 |
ISSN: | 10773118 and 00036951 |
Types: | Journal article |
DOI: | 10.1063/1.2186396 |
ORCIDs: | Boisen, Anja |