Journal article
Three-way flexible cantilever probes for static contact
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanointegration Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
DTU Danchip, Technical University of Denmark4
Department of Electrical Engineering, Technical University of Denmark5
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark6
In micro four-point probe measurements, three-way flexible L-shaped cantilever probes show significant advantages over conventional straight cantilever probes. The L-shaped cantilever allows static contact to the sample surface which reduces the frictional wear of the cantilever tips. We analyze the geometrical design space that must be fulfilled for the cantilevers to obtain static contact with the test sample.
The design space relates the spring constant tensor of the cantilevers to the minimal value of the static tip-to-sample friction coefficient. Using an approximate model, we provide the analytical calculation of the compliance matrix of the L-shaped cantilever. Compared to results derived from finite element model simulations, the theoretical model provides a good qualitative analysis while deviations for the absolute values are seen.
From a statistical analysis, the deviation is small for cantilevers with low effective spring constants, while the deviation is significant for large spring constants where the quasi one-dimensional approximation is no longer valid.
Language: | English |
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Year: | 2011 |
Pages: | 085003 |
ISSN: | 13616439 and 09601317 |
Types: | Journal article |
DOI: | 10.1088/0960-1317/21/8/085003 |
ORCIDs: | Petersen, Dirch Hjorth and Hansen, Ole |