Journal article
Environmental sensors based on micromachined cantilevers with integrated read-out
In
Ultramicroscopy
—
2000, Volume 82, Issue 1-4, pp. 11-16
Abstract
An AFM probe with integrated piezoresistive read-out has been developed and applied as a cantilever-based environmental sensor. The probe has a built-in reference cantilever, which makes it possible to subtract background drift directly in the measurement. Moreover, the integrated read-out facilitates measurements in liquid.
The probe has been successfully implemented in gaseous as well as in liquid experiments. For example, the probe has been used as an accurate and minute thermal sensor and as a humidity sensor. In liquid, the probe has been used to detect the presence of alcohol in water. (C) 2000 Elsevier Science B.V.
All rights reserved.
| Language: | English |
|---|---|
| Year: | 2000 |
| Pages: | 11-16 |
| ISSN: | 18792723 and 03043991 |
| Types: | Journal article |
| DOI: | 10.1016/S0304-3991(99)00148-5 |
| ORCIDs: | Boisen, Anja and Hansen, Ole |
