Conference paper
Accuracy of micro four-point probe measurements on inhomogeneous samples: A probe spacing dependence study
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
Nanointegration Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark5
Magnetic Systems Group, LabChip Section, Department of Micro- and Nanotechnology, Technical University of Denmark6
LabChip Section, Department of Micro- and Nanotechnology, Technical University of Denmark7
In this paper, we discuss a probe spacing dependence study in order to estimate the accuracy of micro four-point probe measurements on inhomogeneous samples. Based on sensitivity calculations, both sheet resistance and Hall effect measurements are studied for samples (e.g. laser annealed samples) with periodic variations of sheet resistance, sheet carrier density, and carrier mobility.
With a variation wavelength of ¿, probe spacings from 0.0012 to 1002 have been applied to characterize the local variations. The calculations show that the measurement error is highly dependent on the probe spacing. When the probe spacing is smaller than 1/40 of the variation wavelength, micro four-point probes can provide an accurate record of local properties with less than 1% measurement error.
All the calculations agree well with previous experimental results.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2009 |
| Pages: | 1-6 |
| Proceedings: | 17th International Conference on Advanced Thermal Processing of Semiconductors RTP09 |
| ISBN: | 1424438144 , 1424438152 , 9781424438143 and 9781424438150 |
| ISSN: | 1944026x and 19440251 |
| Types: | Conference paper |
| DOI: | 10.1109/RTP.2009.5373449 |
| ORCIDs: | Petersen, Dirch Hjorth and Hansen, Ole |
Annealing Area measurement Charge carrier density Density measurement Electrical resistance measurement Hall effect Hall effect measurements Measurement errors Probes Semiconductor laser arrays Wavelength measurement carrier mobility electron probes inhomogeneous media inhomogeneous samples laser annealed samples laser beam annealing measurement error measurement errors microfour-point probe measurements probe spacing dependence sheet carrier density sheet resistance
