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Conference paper

SPO mirror plate production and coating

In Proceedings of Spie — 2021, Volume 11822, pp. 1182207-1182207-11

By Landgraf, Boris1; Babić, Ljubiša1; Barrière, Nicolas M.1; Bayerle, Alex1; Castiglione, Luigi1; Collon, Maximilien J.1; Eenkhoorn, Noë1; Girou, David1; Günther, Ramses1; Hauser, Enrico1; Jenkins, Yvette1; Keek, Laurens1; Okma, Ben1; Serano, Gregorio M.1; Thete, Aniket1; Vacanti, Giuseppe1; Verhoeckx, Sjoerd1; Vervest, Mark1; Voruz, Luc1; Beijersbergen, Marco W.1; Bavdaz, Marcos4; Wille, Eric4; Ferreira, Ivo4; Fransen, Sebastiaan4; Shortt, Brian4; Riekerink, Mark O.5; Haneveld, Jeroen5; Koelewijn, Arenda5; Wijnperlé, Maurice5; Lankwarden, Jan Joost5; Schurink, Bart5; Start, Ronald5; Van Baren, Coen6; Hieltjes, Paul6; Den Herder, Jan Willem6,7; Handick, Evelyn8; Krumrey, Michael8; Bradshaw, Miranda9; Burwitz, Vadim9; Massahi, Sonny10,11; Svendsen, Sara10,11; Ferreira, Desirée Della Monica10,11; Christensen, Finn E.10,11; Valsecchi, Giuseppe2; Kailla, Geeta3; Phillips, Gavin3; Mundon, William3; Chequer, Ian3; Ball, Kevin3 ...and 39 more

Edited by Pareschi, Giovanni; Gaskin, Jessica A.; O'Dell, Stephen L.

From

Cosine Measurement Systems1

Media Lario S.r.l.2

Teledyne e2v Limited3

ESTEC4

Micronit Microfluidics5

SRON Netherlands Institute for Space Research6

University of Amsterdam7

Physikalisch-Technische Bundesanstalt8

Max Planck Institute for Extraterrestrial Physics9

National Space Institute, Technical University of Denmark10

Astrophysics and Atmospheric Physics, National Space Institute, Technical University of Denmark11

...and 1 more

The Silicon Pore Optics (SPO) technology has been established as a new type of X-ray optics and will enable future X-ray observatories such as Athena and Arcus. SPO is being developed at cosine Research B.V. together with the European Space Agency (ESA) and academic as well as industrial partners. For Athena, about 150,000 mirror plates are required.

With the technology spin-in from the semiconductor industry, mass production processes can be employed to manufacture rectangular SPO mirror plates in high quality, large quantity and at low cost. Over the last years, several aspects of the SPO mirror plates have been reviewed and undergone further developments in terms of effective area, intrinsic behavior of the mirror plates and mass production capability.

The paper will provide an overview of most recent SPO plate designs, mirror plate production status and plan forward including reflective coating process as well as mass production developments.

Language: English
Publisher: SPIE - International Society for Optical Engineering
Year: 2021
Pages: 1182207-1182207-11
Proceedings: SPIE Optical Engineering + Applications 2021
Series: Proceedings of Spie - the International Society for Optical Engineering
Journal subtitle: Optics for Euv, X-ray, and Gamma-ray Astronomy X
ISBN: 1510644822 , 1510644830 , 9781510644823 and 9781510644830
ISSN: 1996756x and 0277786x
Types: Conference paper
DOI: 10.1117/12.2594234
ORCIDs: Massahi, Sonny , Svendsen, Sara , Ferreira, Desirée Della Monica and Christensen, Finn E.
Keywords

Athena Coating Mass production Pore optics SPO Silicon Stack Wafer X-ray astronomy X-ray optics X-ray telescopes

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