Journal article
Reliability of poly 3,4-ethylenedioxythiophene strain gauge
Department of Micro- and Nanotechnology, Technical University of Denmark1
Bioprobes, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Chemical and Biochemical Engineering, Technical University of Denmark3
POEM, Department of Micro- and Nanotechnology, Technical University of Denmark4
We report on the experimentally observed reliability of the piezoresistive effect in strained poly 3,4-ethylenedioxythiophene (PEDT). PEDT is an intrinsic conductive polymer which can be patterned by conventional Cleanroom processing, and thus presents a promising material for all-polymer Microsystems.
The measurements are made on microfabricated test chips with PEDT resistors patterned by conventional UV-lithography and reactive ion etching (RIE). We determine a gauge factor of 3.41 ± 0.42 for the strained PEDT and we see an increase in resistivity from 1.98 · 104 X m to 2.22 · 104 X m when the polymer is immersed in water for 30 min.
The resistivity continues to increase to 2.66 · 104 X m when the resistor is thermally dried due to interactions with oxygen from the ambient. We measure the PEDT sheet resistance over a period of four weeks and see small fluctuations caused by humidity variations. 2007 Elsevier B.V. All rights reserved.
| Language: | English |
|---|---|
| Year: | 2007 |
| Pages: | 1270-1273 |
| ISSN: | 18735568 and 01679317 |
| Types: | Journal article |
| DOI: | 10.1016/j.mee.2007.01.192 |
| ORCIDs: | Mateiu, Ramona Valentina and Boisen, Anja |
