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Conference paper

Ultra-compact Low Pressure Nanoimprint System With Automated Demolding

By Pedersen, Rasmus Haugstrup1,2; Hansen, Ole2,3; Kristensen, Anders1,2

From

Lab-on-a-Chip, Department of Micro- and Nanotechnology, Technical University of Denmark1

Department of Micro- and Nanotechnology, Technical University of Denmark2

MicroNano Tribology and Modeling, Department of Micro- and Nanotechnology, Technical University of Denmark3

Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark4

Language: English
Year: 2006
Proceedings: The 5th International Conference on Nanoimprint and Nanoprint Technology
Types: Conference paper
ORCIDs: Hansen, Ole and Kristensen, Anders

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