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Conference paper · Journal article

Silicon microphones - a Danish perspective

From

Department of Micro- and Nanotechnology, Technical University of Denmark1

Two application areas of microphones are discussed, those for precision measurement and those for hearing instruments. Silicon microphones are under investigation for both areas, and Danish industry plays a key role in both. The opportunities of silicon, as well as the challenges and expectations, are discussed.

For precision measurement the challenge for silicon is large, while for hearing instruments silicon seems to be very promising.

Language: English
Year: 1998
Pages: 64-68
Proceedings: 8th Workshop on Micromachining, Micromechanics and Microsystems
ISSN: 13616439 and 09601317
Types: Conference paper and Journal article
DOI: 10.1088/0960-1317/8/2/005

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