Journal article
Analysis of nano-indentation measurements on carbon nitride films
In
Surface and Coatings Technology
—
2003, Volume 169-170, pp. 739-742
From
University of Cambridge, Department of Engineering, Institute for Manufacturing, Mill Lane, Cambridge CB2 1RX, UK
Abstract
Analysis of nano-indentation experiments on thin carbon nitride films is complicated by the high elastic recovery and high unloading curvature observed with these materials. Methods of data analysis are compared, and a recent model by Cheng and Cheng [Surf. Coat. Technol. 133–134 (2000) 417], which uses the work done during indentation, is applied to carbon nitride films for the first time.
This is found to give better estimates of hardness and modulus than the other methods.
| Language: | English |
|---|---|
| Year: | 2003 |
| Pages: | 739-742 |
| ISSN: | 18793347 and 02578972 |
| Types: | Journal article |
| DOI: | 10.1016/S0257-8972(03)00132-4 |
