Journal article
Intrinsically conductive polymer thin film piezoresistors
Department of Micro- and Nanotechnology, Technical University of Denmark1
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
We report on the piezoresistive effect in the intrinsically conductive polymer, polyaniline. A process recipe for indirect patterning of thin film polyaniline has been developed. Using a specially designed chip, the polyaniline thin films have been characterised with respect to resistivity and strain sensitivity using two- and four-point measurement method.
We have found that polyaniline has a negative gauge factor of K = -4.9, which makes it a candidate for piezoresistive read-out in polymer based MEMS-devices. (C) 2007 Elsevier B.V. All rights reserved.
Language: | English |
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Year: | 2008 |
Pages: | 969-971 |
ISSN: | 18735568 and 01679317 |
Types: | Journal article |
DOI: | 10.1016/j.mee.2007.12.020 |
ORCIDs: | Boisen, Anja |