Conference paper
Longitudinal bulk a coustic mass sensor
Dynamic NEMS Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
Design, fabrication and characterization, in terms of mass sensitivity, is presented for a polycrystalline silicon longitudinal bulk acoustic cantilever. The device is operated in air at 51 MHz, resulting in a mass sensitivity of 100 HZ/fg (1 fg = 10{su−15 g). The initial characterization is conducted by depositing a minute mass by means of focused ion beam.
The total noise in the currently applied measurement system allows for a mass resolution of 0.4 fg in air.
| Language: | English |
|---|---|
| Publisher: | IEEE |
| Year: | 2009 |
| Pages: | 311-314 |
| Proceedings: | 15th International Solid-State Sensors, Actuators and Microsystems Conference (Transducers 2009) |
| ISBN: | 1424441900 , 1424441935 , 9781424441907 , 9781424441938 , 1424441927 and 9781424441921 |
| Types: | Conference paper |
| DOI: | 10.1109/SENSOR.2009.5285500 |
| ORCIDs: | Boisen, Anja |
Acoustic devices Acoustic sensors Acoustic signal detection Bulk acoustic resonator Capacitive sensors Fabrication MEMS Resonance Resonant frequency Sensor arrays Sensor phenomena and characterization Si Silicon acoustic resonators bulk acoustic wave devices cantilevers capacitive readout elemental semiconductors focused ion beam frequency 51 MHz longitudinal bulk acoustic cantilever longitudinal bulk acoustic mass sensor mass sensitivity mass sensor mechanical resonators micromechanical resonators microsensors polycrystalline silicon silicon
