Journal article
Modeling the Kelvin polarization force actuation of Micro- and Nanomechanical systems
Nanoprobes Group, NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark1
NanoSystemsEngineering Section, Department of Micro- and Nanotechnology, Technical University of Denmark2
Department of Micro- and Nanotechnology, Technical University of Denmark3
Polarization forces have become of high interest in micro- and nanomechanical systems. In this paper, an analytical model for a transduction scheme based on the Kelvin polarization force is presented. A dielectric beam is actuated by placing it over the gap of two coplanar electrodes. Finite element method simulations are used to characterize the scheme and to evaluate a field correction factor, which results from simplifying the form of the electric field.
The model has been shown to be valid for dielectrics with different permittivities. The presented model facilitates the design of microresonators and nanoresonators with dielectric actuation, which offers a great freedom in the choice of structural material.
Language: | English |
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Publisher: | American Institute of Physics |
Year: | 2010 |
Pages: | 054510 |
ISSN: | 10897550 and 00218979 |
Types: | Journal article |
DOI: | 10.1063/1.3309027 |
ORCIDs: | Schmid, Silvan and Boisen, Anja |