Journal article
Sub-band-gap laser micromachining of lithium niobate
Laser processing of insulators and semiconductors is usually realized using photon energies exceeding the band-gap energy. This makes laser processing of insulators difficult since high photon energies typically require either a pulsed laser or a frequency-doubled continuous-wave laser. A new method is reported which enables us to do laser processing of lithium niobate using sub-band-gap photons.
Using high scan speeds, moderate power densities, and sub-band-gap photon energies results in volume removal rates in excess of 106µm3/s. This enables fast micromachining of small piezoelectric structures, or simple etching of grooves for precision positioning of optical fibers. ©1995 American Institute of Physics.
Language: | English |
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Publisher: | American Institute of Physics |
Year: | 1995 |
Pages: | 2772-2773 |
ISSN: | 10773118 and 00036951 |
Types: | Journal article |
DOI: | 10.1063/1.113470 |
ABLATION LASER BEAM MACHINING LITHIUM NIOBATES MICROSTRUCTURE SURFACE TREATMENTS