Query: title:(Performance verification of focus variation and confocal microscopes measuring tilted ultra-fine surfaces), Author: Quagliotti

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title:(Performance verification of focus variation and confocal microscopes measuring tilted ultra-fine surfaces) Author: Quagliotti

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title:(Performance AND verification AND of AND focus AND variation AND and AND confocal AND microscopes AND measuring AND tilted AND ultra-fine AND surfaces)

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1 Conference paper

Performance verification of focus variation and confocal microscopes measuring tilted ultra-fine surfaces

Quagliotti, Danilo; Baruffi, Federico; Tosello, Guido; Gasparin, Stefania; Annoni, Massimiliano; Parenti, Paolo; et al. (2 more)

Proceedings of the 16th International Conference of the European Society for Precision Engineering and Nanotechnology, Euspen 2016 — 2016

The behaviour of two optical instruments, scilicet a laser scanning confocal microscope and a focus-variation microscope, was investigated considering measurements of tilted surfaces. The measured samples were twelve steel artefacts for mould surface finish reference, covering Sa roughness

Year: 2016

Language: English

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2 Conference paper

Performance verification of focus variation and confocal microscopes measuring tilted ultra-fine surfaces