Journal article
Fabrication and modeling of narrow capillaries for vacuum system gas inlets
Department of Physics, Technical University of Denmark1
Department of Micro- and Nanotechnology, Technical University of Denmark2
Silicon Microtechnology Group, MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark3
MicroElectroMechanical Systems Section, Department of Micro- and Nanotechnology, Technical University of Denmark4
Center for Individual Nanoparticle Functionality, Centers, Technical University of Denmark5
Center for Nanoteknologi, Centers, Technical University of Denmark6
Micrometer-sized cylindrical capillaries with well-controlled dimensions are fabricated using deep reactive ion etching. The flow through the capillaries is experimentally characterized for varying pressures, temperatures, and diameters. For the parameters used, it is shown that the Knudsen number is in the intermediate flow regime, and Knudsen's expression for the flow fit the data well.
The flow properties of the capillaries make them ideal for introducing gas into vacuum systems and in particular mass spectrometers. ©2005 American Institute of Physics
Language: | English |
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Publisher: | American Institute of Physics |
Year: | 2005 |
Pages: | 044906 |
ISSN: | 10897550 and 00218979 |
Types: | Journal article |
DOI: | 10.1063/1.1829377 |
ORCIDs: | Hansen, Ole |